柔性箔系统中超薄图像传感器芯片的加工与表征

S. Wang, J. S. Spüntrup, B. Albrecht, C. Harendt, J. Burghartz
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引用次数: 0

摘要

自20世纪后期以来,人们对可拉伸、可弯曲和柔性电子产品的需求和兴趣不断增加,这些电子产品适用于不同的应用,如医疗、可穿戴设备和工业应用。与大多数平面且不灵活的图像传感器不同,在这项工作中,超薄图像传感器通过使用Chip-Film Patch技术作为箔中的混合系统(HySiF)来执行,这是高性能和超薄柔性电子产品的概念。该技术允许将超薄芯片和广泛分布的电子元件(如传感器、微控制器或天线)集成在薄的柔性聚合物薄膜中,使用cmos兼容的设备和加工。为了对这种嵌入箔片的图像传感器进行表征,开发了一种适用于Andvantest 93000SOIC测试系统的适配板。本文介绍了HySiF的生产过程及其性能。此外,还讨论了该可弯曲图像传感器在箔片系统中的应用及今后的工作。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Processing and Chracterisation of an Ultra-thin Image Sensor Chip in flexible Foil System
Since the late 20th century, there has been an increasing demand and interest for stretchable, bendable, and flexible electronics for different applications, such as medicine, wearable devices, and in industry applications. Unlike most image sensors, which are planar and inflexible, in this work, an ultra-thin image sensor is performed as a Hybrid System in Foil (HySiF) by using Chip-Film Patch technology, which is a concept for high-performance and ultra-thin flexible electronics. The technology allows the integration of ultra-thin chips and widely distributed electronic components, such as sensors, microcontrollers, or antennas, in thin flexible polymer film, using CMOS-compatible equipment and processing. In order to characterize this image sensor embedded in foil, an adapter board for the Andvantest 93000SOIC test system was developed. This paper demonstrates production process of the HySiF and its´ behavior and performance. In addition, the applications and future work of this bendable image sensor in foil system is discussed.
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