静电放电保护装置的发射显微镜案例研究

2020 XXIX International Scientific Conference Electronics (ET) Pub Date : 2020-09-16 DOI:10.1109/ET50336.2020.9238336

D. Nikolov

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引用次数: 0

摘要

本文用光子发射显微镜研究了一种典型的静电放电保护装置。比较了正常p-n结和失效p-n结隧穿击穿后的光子发射。故障由ESD事件引起。通过比较，可以分析ESD失效的根本原因，识别物理机制，从而进一步分析集成电路中的ESD失效。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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A case study of emission microscopy for ESD protection devices

The paper presents an investigation of a typical ESD protection device with a photon emission microscope. The photon emissions from a normal and failed p-n junction with tunnelling breakdown are compared. The failure is caused by the ESD event. The comparison provides root cause analysis of the ESD failure, recognition of the physical mechanism to enable further analysis of ESD failures in integrated circuits.

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2020 XXIX International Scientific Conference Electronics (ET)

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