35nm下圆柱形GAA NWMBCFET的比较与仿真研究

S. A. Kumar, J. Pravin
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引用次数: 0

摘要

本文利用技术计算机辅助设计(TCAD)仿真工具,对用于亚35nm器件的圆柱形栅极全绕纳米线场效应晶体管(GAA NWFET)与圆柱形栅极全绕纳米线多桥通道场效应晶体管(GAA NWMBCFET)进行了比较。在GAA NWMBCFET中产生了大约12个薄通道,而不是在垂直和水平堆叠中有一个等距离的通道。采用耦合漂移扩散法(DD)和Shockley-Read-Hall复合法(SRH)对器件性能进行了数值评价。利用TCAD数值模拟标定,比较了GAA NWFET和GAA nwmbfet的转移和输出特性。由于超薄机身(UTB),器件中包含多桥通道增加了电流驱动。已经考虑到GAA结构对短通道影响具有良好的不敏感性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Comparison and Simulation study of Cylindrical GAA NWMBCFET for sub 35nm
In this paper, a cylindrical Gate All Around Nano Wire Field Effect Transistor (GAA NWFET) is compared with cylindrical Gate All Around Nano Wire Multi Bridge Channel Field Effect Transistor (GAA NWMBCFET) for sub 35nm devices using Technology Computer Aided Design (TCAD) simulation tool. Instead of one channel with equal distance in vertical and horizontal stacking, about 12 thin channels have been created in GAA NWMBCFET. The device performance has been numerically evaluated using coupled Drift-diffusion (DD) method and Shockley-Read-Hall Recombination method (SRH). The compared transfer and output characteristics of GAA NWFET and GAA NWMBCFET has been reported using the TCAD numerical simulation calibrations. The inclusion of multi bridge channel in the device has increased its current drive because of the Ultra-Thin Body (UTB). It has been accounted for that the GAA structure has a decent insusceptibility to short channel impacts.
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