XPS/UPS/FES复合系统表征掺杂CVD金刚石的电子发射机理

2006 19th International Vacuum Nanoelectronics Conference Pub Date : 2006-07-01 DOI:10.1109/IVNC.2006.335318

H. Yamaguchi, I. Saito, Y. Kudo, T. Masuzawa, M. Takahashi, T. Yamada, M. Kudo, Y. Takakuwa, K. Okano

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引用次数: 0

摘要

本研究采用x射线光电子能谱(XPS)/紫外光电子能谱(UPS)/场发射能谱(FES)系统对掺杂CVD金刚石的电子发射机理进行了表征。利用从系统中得到的电子能量分布，绘制出发射金刚石的能带图

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Electron Emission Mechanism of Doped CVD Diamond Characterised by Combined XPS/UPS/FES System

In this study, combined X-ray photoelectron spectroscopy (XPS)/ultraviolet photoelectron spectroscopy (UPS)/field emission spectroscopy (FES) system was used to characterize the electron emission mechanism of doped CVD diamond. The energy band diagram of emitting diamond is drawn using the electron energy distribution obtained from the system

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2006 19th International Vacuum Nanoelectronics Conference

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