光学超分辨技术及其应用

2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale Pub Date : 2013-08-01 DOI:10.1109/3M-NANO.2013.6737447

Wang Nan, Jiang Wei, Yan Wei, Hu Song

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引用次数: 0

摘要

随着信息技术的进一步发展，光学超分辨率技术已成为当前研究的热点之一，其重要性不言而喻。本文详细分析了光学超分辨技术的定义和实现方法。然后对光刻技术的两个广泛应用领域(光数据存储和光刻)进行了阐述，并介绍了一些典型的应用和最新的科研成果。

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Optical super resolution technology and its application

With the further development of information technology, optical super resolution technology has become one of the hottest topics of current research, whose importance is self-evident. This paper analyses the definition and implementation method of optical super resolution technology in detail. Then it illustrates two areas which are widely used (optical data storage and lithographic), and presents some typical applications and the latest achievements in scientific research.

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2013 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale

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