折纸启发形状记忆折叠微驱动器

Lena Seigner, O. Bezsmertna, S. Fähler, Georgino Kaleng Tshikwand, F. Wendler, M. Kohl
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引用次数: 1

摘要

介绍了一种具有单向形状记忆效应的基于镍钛薄膜的折纸型折叠微致动器的设计、制造和性能。独立的镍钛薄膜通过激光切割或光刻技术进行微机械加工,以实现双光束结构,允许使用电流进行直接焦耳加热。NiTi微致动器与刚性部分(瓷砖)相互连接,形成一个初始平面系统,该系统在加热时可自行折叠成预定的3D形状。采用热机械处理对接收试样进行形状设置,使其最大折叠角接近180°。计算了焦耳加热时的弯矩、弯曲半径和与载荷相关的折叠角。成形工艺对小弯曲半径特别有效,但会产生残余塑性应变。在最大加热功率为900 mW时,无载荷梁结构的可恢复弯曲挠度在0°~ 140°之间。通过引入额外的载荷来考虑瓷砖的影响,平滑的折叠特性演变成一个急剧的转变,从而达到180°的完全偏转。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Origami-Inspired Shape Memory Folding Microactuator
This paper presents the design, fabrication and performance of origami-based folding microactuators based on NiTi films showing the one-way shape memory effect. Freestanding NiTi films are micromachined by laser cutting or photolithography to achieve double-beam structures allowing for direct Joule heating with an electrical current. The NiTi microactuators are interconnected to rigid sections (tiles) forming an initial planar system that self-folds into a predetermined 3D shape upon heating. A thermo-mechanical treatment is used for shape setting of as-received specimens to approach a maximum folding angle of 180°. The bending moments, bending radii and load-dependent folding angles upon Joule heating are evaluated. The shape setting process is particularly effective for small bending radii, which, however, generates residual plastic strain. After shape setting, unloaded beam structures show recoverable bending deflection between 0° and 140° for a maximum heating power of 900 mW. By introducing additional loads to account for the effect of the tiles, the smooth folding characteristic evolves into a sharp transition, whereby full deflection up to 180° is reached.
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