原子力显微镜静电纳米光刻(AFMEN):一个多功能的工具，纳米图案在薄膜和超越

International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors Pub Date : 2023-01-31 DOI:10.1117/12.2646087

S. Lyuksyutov

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引用次数: 0

摘要

AFMEN可使用多种材料，包括剥离石墨烯、溶剂处理的Si(100)、聚合物薄膜和丁苯橡胶。这种简单的一到两步方法是一种工具，几乎可以在纳米尺度上对任何半导体或电介质表面进行制模。

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Atomic force microscopy electrostatic nanolithography (AFMEN): a versatile tool for nano-patterning in thin films and beyond

A variety of materials can be used for the AFMEN including exfoliated graphene, Si (100) treated with solvents, polymer films, and styrene butadiene rubber. This simple one-two stage approach is a tool to pattern almost any semiconductor or dielectric surface at the nanoscale.

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International Workshop on Thin Films for Electronics, Electro-Optics, Energy and Sensors

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