PLD制备的金属氧化物纳米结构的气敏性能

A. Dikovska, N. Nedyalkov, T. Dilova, G. Atanasova, Georgi Avdeev, Plamen Stefanov
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引用次数: 2

摘要

本文报道了用脉冲激光在常压下在空气中沉积气体传感器元件的制备方法。我们重点研究了金属氧化物半导体,即SnO2, TiO2和MoO3,并研究了样品的结构和形貌。应用沉积技术可以形成由纳米颗粒和纳米聚集体组成的纳米结构。我们报告了金属氧化物纳米结构气敏性能的初步结果。将传感器暴露于CO、丙酮和乙醇中,TiO2纳米结构对CO暴露的响应最高。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Gas-sensing properties of metal-oxide nanostructures produced by PLD
We report the fabrication of gas sensor elements by pulsed laser deposition in air at atmospheric pressure. We focused our attention on metal-oxide semiconductors, namely, SnO2, TiO2 and MoO3 and studied the samples’ structure and morphology. The deposition technology applied leads to the formation of nanostructures composed of nanoparticles and nano-aggregates. We report preliminary results on the gas-sensing properties of the metal-oxide nanostructures. The sensors were exposed to CO, acetone and ethanol, with the TiO2 nanostructure demonstrating the highest response to CO exposure.
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