用于多层氮化硅光子平台的高性能垂直层间耦合器

2019 IEEE 16th International Conference on Group IV Photonics (GFP) Pub Date : 2019-08-01 DOI:10.1109/GROUP4.2019.8925686

Xin Mu, Sailong Wu, Lirong Cheng, X. Tu, H. Fu

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引用次数: 0

摘要

我们提出了一种垂直层间耦合器，用于多层氮化硅光子电路的光互连，耦合效率为96.0%。该耦合器尺寸紧凑，长度仅为170 μm，具有超宽带性能。

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High-Performance Vertical Interlayer Coupler for Multilayer Silicon Nitride-on-Silicon Photonic Platform

We propose a vertical interlayer coupler for optical interconnections in multilayer silicon nitride-on-silicon photonic circuits with coupling efficiency of 96.0%. The coupler has a compact size of 170 μm in length and exhibits high performance in an ultra-broad bandwidth.

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2019 IEEE 16th International Conference on Group IV Photonics (GFP)

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