F. Sammoura, Sina Akhari, Nawal Aqab, M. Mahmoud, Liwei Lin
{"title":"多电极压电微机械超声换能器","authors":"F. Sammoura, Sina Akhari, Nawal Aqab, M. Mahmoud, Liwei Lin","doi":"10.1109/ULTSYM.2014.0075","DOIUrl":null,"url":null,"abstract":"Piezoelectric micromachined ultrasonic transducers (pMUTs) with multiple electrodes were shown to have enhanced effective electromechanical coupling factors, about 211% larger than that of the state-of-the-art, single electrode design. In this work, a theoretical model of the electromechanical coupling is developed for the circular-shape, clamped unimorph pMUTs and validated with published experimental results on single electrode structures. A 4-electrode design with a 5 μm-thick poly-Si structural layer, 2 μm-thick PZT piezoelectric layer, and 135 μm in radius has an effective electromechanical coupling of 13.72%, which is 211% higher than that of a conventional single-electrode pMUT. As such, multiple electrode pMUTs could replace the state-of-art, single-electrode pMUTs for high electromechanical coupling in various ultrasonic transduction applications, such as gesture recognition and medical imaging.","PeriodicalId":153901,"journal":{"name":"2014 IEEE International Ultrasonics Symposium","volume":"48 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"17","resultStr":"{\"title\":\"Multiple electrode piezoelectric micromachined ultrasonic transducers\",\"authors\":\"F. Sammoura, Sina Akhari, Nawal Aqab, M. Mahmoud, Liwei Lin\",\"doi\":\"10.1109/ULTSYM.2014.0075\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Piezoelectric micromachined ultrasonic transducers (pMUTs) with multiple electrodes were shown to have enhanced effective electromechanical coupling factors, about 211% larger than that of the state-of-the-art, single electrode design. In this work, a theoretical model of the electromechanical coupling is developed for the circular-shape, clamped unimorph pMUTs and validated with published experimental results on single electrode structures. A 4-electrode design with a 5 μm-thick poly-Si structural layer, 2 μm-thick PZT piezoelectric layer, and 135 μm in radius has an effective electromechanical coupling of 13.72%, which is 211% higher than that of a conventional single-electrode pMUT. As such, multiple electrode pMUTs could replace the state-of-art, single-electrode pMUTs for high electromechanical coupling in various ultrasonic transduction applications, such as gesture recognition and medical imaging.\",\"PeriodicalId\":153901,\"journal\":{\"name\":\"2014 IEEE International Ultrasonics Symposium\",\"volume\":\"48 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-10-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"17\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2014 IEEE International Ultrasonics Symposium\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ULTSYM.2014.0075\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2014 IEEE International Ultrasonics Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ULTSYM.2014.0075","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Piezoelectric micromachined ultrasonic transducers (pMUTs) with multiple electrodes were shown to have enhanced effective electromechanical coupling factors, about 211% larger than that of the state-of-the-art, single electrode design. In this work, a theoretical model of the electromechanical coupling is developed for the circular-shape, clamped unimorph pMUTs and validated with published experimental results on single electrode structures. A 4-electrode design with a 5 μm-thick poly-Si structural layer, 2 μm-thick PZT piezoelectric layer, and 135 μm in radius has an effective electromechanical coupling of 13.72%, which is 211% higher than that of a conventional single-electrode pMUT. As such, multiple electrode pMUTs could replace the state-of-art, single-electrode pMUTs for high electromechanical coupling in various ultrasonic transduction applications, such as gesture recognition and medical imaging.