Finmeccanica(原Selex ES) 8μm间距MCT像素的进一步开发

D. Jeckells, R. McEwen, S. Bains, Martin Herbert
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引用次数: 5

摘要

Finmeccanica(前身为Selex ES)于2015年推出了8μm螺距的高性能汞镉碲化(MCT)红外探测器,其SuperHawk设备建立在已经用于制造24μm, 20μm, 16μm和12μm螺距设备的标准生产工艺之上。Finmeccanica专利设计的二极管结构的灵活性,与Finmeccanica成熟的生产金属有机气相外延(MOVPE) MCT生长工艺结合使用,可以精细控制二极管的电气和光学结构,包括自由选择截止波长。通过将光学散射、像素间串扰和载流子扩散等模糊机制降低到可忽略不计的水平,平台像素设计固有地提供了主要的系统性能优势。即使在超过120K的温度下工作,SuperHawk探测器也表现出无与伦比的MTF和NETD性能。SuperHawk集成探测器冷却器组件(IDCA)受益于Finmeccanica最近的杜瓦(dewar)开发,该组件提高了热效率,同时在广泛的应用中保持了机械完整性,可以使用更小的低温冷却器来降低系统SWAP-C。给出了性能和鉴定结果,并给出了实例图像。SuperHawk为目前基于标准清晰度16μm和15μm红外探测器格式的系统提供了简单的高分辨率升级。该论文还讨论了进一步的工作,以提高已建立的8μm工艺的工作温度,利用Finmeccanica的高温(HOT) MCT,以及SuperHawk设备的LWIR变体选项。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Further developments of 8μm pitch MCT pixels at Finmeccanica (formerly Selex ES)
Finmeccanica (formerly Selex ES) introduced high performance mercury cadmium telluride (MCT) infrared detectors on an 8μm pitch in 2015 with their SuperHawk device which builds on standard production processes already used for the manufacture of 24μm, 20μm, 16μm and 12μm pitch devices. The flexibility of the proprietary Finmeccanica designed diode structure, used in conjunction with the mature production Metal Organic Vapour Phase Epitaxy (MOVPE) MCT growth process at Finmeccanica, enables fine control of diode electrical and optical structure including free choice of cut-off wavelength. The mesa pixel design inherently provides major system performance benefits by reducing blurring mechanisms, including optical scattering, inter-pixel cross-talk and carrier diffusion, to negligible levels. The SuperHawk detector has demonstrated unrivalled MTF and NETD performance, even when operating at temperatures in excess of 120K. The SuperHawk Integrated Detector Cooler Assembly (IDCA) benefits from recent dewar developments at Finmeccanica, which have improved thermal efficiencies while maintaining mechanical integrity over a wide range of applications, enabling use of smaller cryo-coolers to reduce system SWAP-C. Performance and qualification results are presented together with example imagery. SuperHawk provides an easy high resolution upgrade for systems currently based on standard definition 16μm and 15μm infrared detector formats. The paper also addresses further work to increase the operating temperature of the established 8μm process, exploiting High Operating Temperature (HOT) MCT at Finmeccanica, as well as options for LWIR variants of the SuperHawk device.
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