{"title":"BSTO薄膜中具有感应压电效应的电调谐体声滤波器","authors":"P. Turalchuk, I. Vendik, O. Vendik, J. Berge","doi":"10.1109/EUMC.2008.4751801","DOIUrl":null,"url":null,"abstract":"In this paper we discuss a potential realizability of a tunable bulk acoustic filter based on BSTO film for microwave applications. The estimation of characteristics of the tunable TFBAR was done by processing the experimental data obtained for the BSTO resonator using the model of the induced piezoelectric effect. The third-order tunable TFBAR filter was designed. The necessary set of the acoustic and electric parameters of the tunable ferroelectric based TFBAR was proclaimed. The 10% tunability of the TFBAR filter pass band was estimated by a simulation. The simulated characteristics were obtained taking into consideration a real structure of the BSTO based resonators (electrodes and acoustic mirror).","PeriodicalId":371257,"journal":{"name":"2008 European Conference on Wireless Technology","volume":"2 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Electrically tunable bulk acoustic filters with induced piezoelectric effect in BSTO film\",\"authors\":\"P. Turalchuk, I. Vendik, O. Vendik, J. Berge\",\"doi\":\"10.1109/EUMC.2008.4751801\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we discuss a potential realizability of a tunable bulk acoustic filter based on BSTO film for microwave applications. The estimation of characteristics of the tunable TFBAR was done by processing the experimental data obtained for the BSTO resonator using the model of the induced piezoelectric effect. The third-order tunable TFBAR filter was designed. The necessary set of the acoustic and electric parameters of the tunable ferroelectric based TFBAR was proclaimed. The 10% tunability of the TFBAR filter pass band was estimated by a simulation. The simulated characteristics were obtained taking into consideration a real structure of the BSTO based resonators (electrodes and acoustic mirror).\",\"PeriodicalId\":371257,\"journal\":{\"name\":\"2008 European Conference on Wireless Technology\",\"volume\":\"2 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2008-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2008 European Conference on Wireless Technology\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/EUMC.2008.4751801\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 European Conference on Wireless Technology","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/EUMC.2008.4751801","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Electrically tunable bulk acoustic filters with induced piezoelectric effect in BSTO film
In this paper we discuss a potential realizability of a tunable bulk acoustic filter based on BSTO film for microwave applications. The estimation of characteristics of the tunable TFBAR was done by processing the experimental data obtained for the BSTO resonator using the model of the induced piezoelectric effect. The third-order tunable TFBAR filter was designed. The necessary set of the acoustic and electric parameters of the tunable ferroelectric based TFBAR was proclaimed. The 10% tunability of the TFBAR filter pass band was estimated by a simulation. The simulated characteristics were obtained taking into consideration a real structure of the BSTO based resonators (electrodes and acoustic mirror).
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