石墨烯薄片电导及太赫兹时域光谱成像

2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) Pub Date : 2016-07-01 DOI:10.1109/3M-NANO.2016.7824975

Shihan Yan, Zhancheng Li, Dongshan Wei, H. Cui, Chun-lei Du

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引用次数: 2

摘要

提出了一种基于太赫兹(THz)时域光谱技术的大面积石墨烯薄膜的快速、无损和高穿透质量表征方法。通过太赫兹透射率测量得到了石墨烯薄膜的薄片电导，并基于菲涅耳系数和Tinkham薄膜方程对数据进行了分析。与传统的四点探头法相比，测量结果具有较好的一致性。利用太赫兹法对石墨烯进行了电导成像，并用于评价硅衬底上石墨烯薄膜的质量。

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Sheet conductance and imaging of graphene by terahertz time-domain spectroscopy

A rapid, nondestructive and high-through quality characterization of large-area graphene films is presented based on the Terahertz (THz) time-domain spectroscopy technology. Sheet conductance of graphene films was obtained from the THz transmission measurement and the data analysis was based on the Fresnel coefficient and the Tinkham film equation. In comparison to the traditional four-point probes method, the measurement result showed a quite good consistency. Conductance imaging of graphene by THz method was performed and used to estimate the quality of graphene films on the Si substrate.

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2016 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)

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