合成石英玻璃衬底上氢化非晶硅光子器件

2015 IEEE 12th International Conference on Group IV Photonics (GFP) Pub Date : 2015-08-01 DOI:10.1109/GROUP4.2015.7305942

M. Okano, E. Omoda, Y. Maegami, Y. Atsumi, Y. Sakakibara, T. Kamei, M. Mori

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引用次数: 0

摘要

我们在合成石英玻璃衬底上制备了氢化非晶硅(a- si:H)光子器件。a- si: h线波导、环形谐振器和定向耦合器使用i线步进光刻技术成功制造。

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Hydrogenated amorphous silicon photonic devices on synthetic quartz glass substrate

We have fabricated hydrogenated amorphous silicon (a-Si:H) photonic devices on a synthetic quartz glass substrate. a-Si:H-wire waveguides, ring resonators, and directional couplers were successfully fabricated using a i-line stepper lithograpy.

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来源期刊

2015 IEEE 12th International Conference on Group IV Photonics (GFP)

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