环境氧对PdNi纳米膜氢传感器性能的影响

Proceedings of the 2022 5th International Conference on Sensors, Signal and Image Processing Pub Date : 2022-10-28 DOI:10.1145/3577148.3577160

Jiawei Tian, Hongchuan Jiang

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引用次数: 0

摘要

研究了环境中氧对PdNi纳米膜氢传感器性能的影响。由于氧气的吸收，传感器的电阻在引入氢气时迅速下降，然后增加，在氢气排放时下降到底部后再次增加。这种现象干扰了氢浓度的准确检测。特别是当工作温度升高而检测氢浓度降低时，氧气的存在会引起传感器电阻更剧烈的波动。最后，我们找到了一种有效抑制氧影响的方法，即用反应溅射和适量的氢来代替普通的溅射来制备PdNi纳米膜。

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The Effect of Oxygen in The Environment to The Performance of PdNi Nano-Film Hydrogen Sensor

The effect of the oxygen in the environment to the performance of PdNi nano-film hydrogen sensor was studied in this work. Caused by oxygen absorption, the resistance of the sensor drops rapidly before it increases when hydrogen is introduced, and increases again after decreases to the bottom when hydrogen is discharged. This phenomenon interferes with the accurate detection of hydrogen concentration. Especially when the working temperature is increased and the detecting hydrogen concentration is decreased, the presence of oxygen causes more intense fluctuations in the resistance of the sensor. Finally, we found a way to effectively suppress the influence of oxygen, which is, using reactive sputtering with a proper amount of hydrogen to replace ordinary sputtering to fabricate PdNi nano-film.

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Proceedings of the 2022 5th International Conference on Sensors, Signal and Image Processing

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