Xin Yu, E. Arbabi, L. Goddard, Xiuling Li, Xiaogang Chen
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Monolithic integration of the self-rolled-up vertical SiNx ring resonator and the ridge waveguide
We incorporated axial confinement to the self-rolled-up SiNx tube to form a vertical ring resonator and monolithically integrate it with a ridge waveguide to suppress higher order mode and achieve 3x wider free spectral range.