具有光栅结构优化的多色量子阱和超晶格红外探测器

Shih-Hung Lin, Bor-Wei Liang, C. Kuan, R. Yu
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引用次数: 0

摘要

我们设计了一种具有超晶格、梯度势垒和多量子阱的红外光电探测器。在探测器上制作了固定周期2 μm、不同深度的光栅,并讨论了其对探测器性能的影响。周期为2 μm、深度为1.3 μm的光栅性能最好。电磁在结构中的分布模拟结果与实验结果一致。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Multicolor quantum well and superlattice infrared photodetector with grating structure optimization
We have designed an infrared photodetector which has a superlattice (SL), graded barriers and then multiple quantum wells (MQWs). The grating with fixed 2 μm period and different depth on detector was fabricated and its effects on detector’s performance was discussed. The grating with 2 μm period and 1.3 μm depth shows the highest performance. The simulation of electromagnetic distribution in structure shows the same trend as experiment results.
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