测量微测热计结构热时间常数的简单技术

ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307) Pub Date : 1999-03-15 DOI:10.1109/ICMTS.1999.766239

P. Lambkin, N. Folan, B. Lane

{"title":"测量微测热计结构热时间常数的简单技术","authors":"P. Lambkin, N. Folan, B. Lane","doi":"10.1109/ICMTS.1999.766239","DOIUrl":null,"url":null,"abstract":"A straightforward electrical technique for determining the thermal time constant of microbolometer structures is presented. An impedance measurement of a microbolometer using an LCR meter shows that the phase lag/lead reaches a maximum as a function of frequency. It is shown that the frequency of maximum phase difference is simply related to the thermal time constant.","PeriodicalId":273071,"journal":{"name":"ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1999-03-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Simple technique for the measurement of thermal time constants of microbolometer structures\",\"authors\":\"P. Lambkin, N. Folan, B. Lane\",\"doi\":\"10.1109/ICMTS.1999.766239\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A straightforward electrical technique for determining the thermal time constant of microbolometer structures is presented. An impedance measurement of a microbolometer using an LCR meter shows that the phase lag/lead reaches a maximum as a function of frequency. It is shown that the frequency of maximum phase difference is simply related to the thermal time constant.\",\"PeriodicalId\":273071,\"journal\":{\"name\":\"ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)\",\"volume\":\"12 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"1999-03-15\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICMTS.1999.766239\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICMTS.1999.766239","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 4

摘要

提出了一种测定微测热计结构热时间常数的简单电技术。用LCR计对微辐射热计进行阻抗测量表明，相位滞后/超前随频率的变化达到最大值。结果表明，最大相位差的频率与热时间常数有简单的关系。

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Simple technique for the measurement of thermal time constants of microbolometer structures

A straightforward electrical technique for determining the thermal time constant of microbolometer structures is presented. An impedance measurement of a microbolometer using an LCR meter shows that the phase lag/lead reaches a maximum as a function of frequency. It is shown that the frequency of maximum phase difference is simply related to the thermal time constant.

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来源期刊

ICMTS 1999. Proceedings of 1999 International Conference on Microelectronic Test Structures (Cat. No.99CH36307)

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