集成光子学用低损耗非晶硅通道波导

3rd IEEE International Conference on Group IV Photonics, 2006. Pub Date : 2006-10-09 DOI:10.1109/GROUP4.2006.1708231

D. Sparacin, R. Sun, Anant Agarwal, M. Beals, J. Michel, L. Kimerling, T. Conway, A. Pomerene, D. Carothers, M. Grove, D. Gill, M. Rasras, S. Patel, A. White

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引用次数: 46

摘要

制作并测量了非晶硅单模通道波导，其传输损耗在TE模式下低至6.5 dB/cm，在TM模式下低至4.5 dB/cm。PECVD a-Si沉积条件的变化产生了体积损失<1 dB/cm的a-Si材料

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Low-Loss Amorphous Silicon Channel Waveguides for Integrated Photonics

Amorphous silicon (a-Si), single-mode, channel waveguides were fabricated and measured with transmission losses as low as 6.5 dB/cm for the TE mode and 4.5 dB/cm for the TM mode. Variations in the PECVD a-Si deposition conditions yielded a-Si materials with bulk losses <1 dB/cm

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3rd IEEE International Conference on Group IV Photonics, 2006.

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