All-digital process-variation-calibrated timing generator for ATE with 1.95-ps resolution and a maximum 1.2-GHz test rate

We propose a timing generator for use in high-performance automatic testing equipment that achieves a high, wide-range test cycle frequency and process variation tolerance using four sub-timing generators and a CLKRATE divider. Each sub-timing generator is composed of an edge vernier, an integer delay generator, and an offset canceller. A prototype chip fabricated using 0.13-μm CMOS technology can achieve an arbitrary test cycle frequency of up to 1.2 GHz, a timing resolution of 1.95 ps, a power consumption of 90 mW, and an area of 1.5 mm2.