一种新型电热顺应微夹持器

P. Vargas-Chable, C. A. Ferrara-Bello, J. O. Sandoval-Reyes, M. Tecpoyotl-Torres, J. Varona
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引用次数: 3

摘要

本文提出了一种基于两根垂直梁和一个v形驱动器的新型微夹持器。在每个垂直排列中,在其端点连接的双夹紧梁的约束位移在每个梁中产生屈曲,这有利于微夹持器的每个臂的位移,通常是打开的。这些安排构成了微夹持器的高度柔性结构。它们的屈曲是由v形箭头施加的力产生的,在微夹持钳爪中产生的反作用力在174.44 $\mu$ N范围内。雪佛龙执行机构是由一个热源。微夹持器尖端温度为34.42°C,工作频率为33.966 kHz,最大负载温度为200°C。采用基于有限元分析的SIMSOLIDTM软件对整体结构进行力学、热、模态分析。以多晶硅为结构材料进行仿真。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
A novel electrothermal compliance microgripper
In this paper, a novel microgripper based on two perpendicular arrangements of beams and a chevron actuator is shown. In each perpendicular arrangement, the constrained displacement of the double clamped beams, joined at their endpoint, produces a buckling in each beam, which favors the displacement of each arm of the microgripper, normally open. These arrangements constitute the highly flexible structures of the microgripper. Their buckling is produced by the force applied by chevron arrow, producing a reaction force in the range of 174.44 $\mu$ N in the microgripper jaws. Chevron actuator is fed by a thermal source. Temperature in microgripper tips is of 34.42°C and the operation frequency is 33.966 kHz, at maximum load thermal applied of 200°C. The mechanical, thermal and modal analyses of this integrated structure was supported by SIMSOLIDTM, based on Finite Element Analysis. The simulation was developed with Polysilicon as structural material.
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