S.J. Specter, T. Lyszczarz, M. Geis, D. Lennon, J. Yoon, M. Grein, R. Schulein, F. Gan, F. Kaertner
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Low-Power, High-Speed Mach-Zehnder Modulator in Silicon
A high speed diode-based optical modulator has been fabricated in silicon. This device achieves an extremely low VpiL of 0.02 V-cm from 10-100 MHz. Modulation depths of 30% have been achieved at an input power of 100 mW at 5 GHz