电子发射体用金刚石p-i-n-纳米c二极管

F. Koeck, M. Benipal, H. Surdi, R. Nemanich
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引用次数: 0

摘要

电子发射器广泛应用于行波管(twt)中,用于通信、雷达应用和自由电子激光器等科学仪器。这些仪器通常利用阴极,通过应用热能或高电场释放电子电流。一种利用金刚石负电子亲和表面修饰半导体p-i-n二极管的新型电子发射方法。在正向偏压下,将电子注入金刚石二极管的导带,并将一部分电子发射到真空中。电子发射发生在室温和低电场下。我们利用等离子体增强化学气相沉积(PECVD)技术在掺杂硼的单晶衬底上制备了一种含有高导电性纳米结构碳(nanoC)接触层的改性金刚石p-i-n二极管。然后利用光刻技术制造了具有各种几何形状的发射器器件。经过一个氢钝化步骤后,各个器件在真空中进行了表征。在正向偏压下,p-i-n-纳米c二极管显示出双极输运的发光特征。在典型的二极管电流为0.1A的情况下,从尺寸为1.2mm x 0.2mm的单个器件中测量到的电子发射电流接近0.4mA。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Diamond p-i-n-nanoC Diodes for Electron Emitters
Electron emitters are widely deployed in traveling wavetubes (TWTs) for communications, radar applications, and scientific apparatus like free electron lasers. These instruments typically utilize cathodes that release an electron current through application of thermal energy or high electric fields. A novel electron emitter approach exploits the negative electron affinity surface of diamond in a modified semiconductor p-i-n diode. Under a forward bias electrons are injected into the conduction band of the diamond diode and a fraction are emitted into vacuum. Electron emission occurs at room temperature and low electric fields. We have prepared a modified diamond p-i-n diode that included a highly conducting nanostructured carbon (nanoC) contact layer utilizing plasma-enhanced chemical vapor deposition (PECVD) on a single crystal boron doped substrate. Emitter devices with various geometries were then fabricated using photo-lithography. After a hydrogen passivation step individual devices were characterized in vacuum. Under a forward bias the p-i-n-nanoC diodes displayed light emission indicative of bipolar transport. With a typical diode current of 0.1A an electron emission current approaching 0.4mA was measured from a single device sized 1.2mm x 0.2mm.
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