{"title":"测量激光束的发散以校正干涉位移测量","authors":"C. Sasso, C. Palmisano, E. Massa, G. Mana","doi":"10.1109/CPEM.2014.6898330","DOIUrl":null,"url":null,"abstract":"Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.","PeriodicalId":256575,"journal":{"name":"29th Conference on Precision Electromagnetic Measurements (CPEM 2014)","volume":"72 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2014-10-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Measuring the divergence of laser beams to correct interferometric displacement measurements\",\"authors\":\"C. Sasso, C. Palmisano, E. Massa, G. Mana\",\"doi\":\"10.1109/CPEM.2014.6898330\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.\",\"PeriodicalId\":256575,\"journal\":{\"name\":\"29th Conference on Precision Electromagnetic Measurements (CPEM 2014)\",\"volume\":\"72 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-10-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"29th Conference on Precision Electromagnetic Measurements (CPEM 2014)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CPEM.2014.6898330\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"29th Conference on Precision Electromagnetic Measurements (CPEM 2014)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CPEM.2014.6898330","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Measuring the divergence of laser beams to correct interferometric displacement measurements
Owing to the impossibility of a plane-wave illumination, diffraction affects optical interferometry applied to the measuring of linear displacement. Therefore, the measurement of the beam divergence is essential to calculate the needed corrections. This paper examines a measurement method relying on the Fourier optics. Particular emphasis is given to the assessment of systematic errors in the measurement of the Si lattice parameter by combined X-ray and optical interferometry.
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