中心部分电镀at切割圆形石英石板材的有限元分析

2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA) Pub Date : 2015-12-28 DOI:10.1109/SPAWDA.2015.7364428

Xintao Zhao, Z. Qian, Bin Wang

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引用次数: 1

摘要

利用商业软件ANSYS的三维有限元模型，分析了中心部分电镀AT-cut石英石圆板的厚度-剪切和厚度-扭转振动的自由振动频率和模态。本文采用三维有限元法对石英晶体谐振器在厚度-剪切模式下的位移和振动频率进行了分析，这在石英晶体谐振器的设计中具有重要意义。捕获模式的振动主要局限在圆形电极下。位移分布的三维有限元解可用于结构参数的优化选择。

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Finite Element Analysis of centrally partially electroded circular AT-cut quartz plate

This paper analyses free vibration frequencies and modes for thickness-shear and thickness-twist vibrations of centrally partially electroded circular AT-cut quartz plate by using 3-D finite element models of commercial package ANSYS. The analysis has been done with the 3-D Finite Element Analysis (FEA) for displacements and vibration frequency at the thickness-shear mode, which is important in the design of quartz crystal resonators. Trapped modes are found with vibrations mainly confined under the circular electrodes. The 3-D FEA solutions of displacement distribution can be used in the optimal selection of the structural parameters.

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2015 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA)

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