{"title":"用于柔性、透明、超低功耗电子和传感器的全聚合物NEM继电器","authors":"Yanbiao Pan, Fangzhou Yu, Jaeseok Jeon Rutgers","doi":"10.1109/MEMSYS.2015.7051115","DOIUrl":null,"url":null,"abstract":"A fully-polymeric nano-electro-mechanical (NEM) relay based on a conductive polymer, Poly(3,4-Ethylenedi oxythiophene):Polystyrene-Sulfonate (PEDOT:PSS) and dielectric polymers is proposed for the first time to enable flexible, transparent, ultralow-power electronics and sensors, and the first functional prototype fabricated using a five-mask low-thermal-budget process is demonstrated. The prototype shows zero off-state leakage current, abrupt on/off switching, complementary switching behavior, and relatively high on/off current ratio. Exploiting the water-absorption behavior of the polymers, the potential use of the relay as a biochemical sensor is also demonstrated.","PeriodicalId":337894,"journal":{"name":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","volume":"440 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2015-03-02","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"4","resultStr":"{\"title\":\"Fully-polymeric NEM relay for flexible, transparent, ultra-low power electronics and sensors\",\"authors\":\"Yanbiao Pan, Fangzhou Yu, Jaeseok Jeon Rutgers\",\"doi\":\"10.1109/MEMSYS.2015.7051115\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A fully-polymeric nano-electro-mechanical (NEM) relay based on a conductive polymer, Poly(3,4-Ethylenedi oxythiophene):Polystyrene-Sulfonate (PEDOT:PSS) and dielectric polymers is proposed for the first time to enable flexible, transparent, ultralow-power electronics and sensors, and the first functional prototype fabricated using a five-mask low-thermal-budget process is demonstrated. The prototype shows zero off-state leakage current, abrupt on/off switching, complementary switching behavior, and relatively high on/off current ratio. Exploiting the water-absorption behavior of the polymers, the potential use of the relay as a biochemical sensor is also demonstrated.\",\"PeriodicalId\":337894,\"journal\":{\"name\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"volume\":\"440 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-03-02\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"4\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/MEMSYS.2015.7051115\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.2015.7051115","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fully-polymeric NEM relay for flexible, transparent, ultra-low power electronics and sensors
A fully-polymeric nano-electro-mechanical (NEM) relay based on a conductive polymer, Poly(3,4-Ethylenedi oxythiophene):Polystyrene-Sulfonate (PEDOT:PSS) and dielectric polymers is proposed for the first time to enable flexible, transparent, ultralow-power electronics and sensors, and the first functional prototype fabricated using a five-mask low-thermal-budget process is demonstrated. The prototype shows zero off-state leakage current, abrupt on/off switching, complementary switching behavior, and relatively high on/off current ratio. Exploiting the water-absorption behavior of the polymers, the potential use of the relay as a biochemical sensor is also demonstrated.
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
