NCLR 1kw 1khz XeCl准分子激光器的光学质量

R. M. Hofstra, J. Timmermans, Hubert J. G. Van Heel
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引用次数: 5

摘要

研究了NCLR的1kw, 1khz XeCl准分子激光器的光学质量。在高达1khz的短突发模式下可以获得接近衍射极限的光束。长突发模式操作目前受到光学质量的限制。光束指向变化减小到发散角的一半,并且与激光系统的重复频率无关。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Optical quality of NCLR's 1-kW 1-kHz XeCl excimer laser
The optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser has been investigated. Nearly diffraction limited beams can be obtained in short burst mode up to 1 kHz. Long burst mode operation is currently limited by the quality of the optics. The beam pointing variation is reduced to half the divergence angle and is found to be independent of the repetition rate of the laser system.
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