R. M. Hofstra, J. Timmermans, Hubert J. G. Van Heel
{"title":"NCLR 1kw 1khz XeCl准分子激光器的光学质量","authors":"R. M. Hofstra, J. Timmermans, Hubert J. G. Van Heel","doi":"10.1117/12.380908","DOIUrl":null,"url":null,"abstract":"The optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser has been investigated. Nearly diffraction limited beams can be obtained in short burst mode up to 1 kHz. Long burst mode operation is currently limited by the quality of the optics. The beam pointing variation is reduced to half the divergence angle and is found to be independent of the repetition rate of the laser system.","PeriodicalId":375593,"journal":{"name":"Advanced High-Power Lasers and Applications","volume":"46 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-04-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":"{\"title\":\"Optical quality of NCLR's 1-kW 1-kHz XeCl excimer laser\",\"authors\":\"R. M. Hofstra, J. Timmermans, Hubert J. G. Van Heel\",\"doi\":\"10.1117/12.380908\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser has been investigated. Nearly diffraction limited beams can be obtained in short burst mode up to 1 kHz. Long burst mode operation is currently limited by the quality of the optics. The beam pointing variation is reduced to half the divergence angle and is found to be independent of the repetition rate of the laser system.\",\"PeriodicalId\":375593,\"journal\":{\"name\":\"Advanced High-Power Lasers and Applications\",\"volume\":\"46 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-04-03\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"5\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Advanced High-Power Lasers and Applications\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1117/12.380908\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced High-Power Lasers and Applications","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1117/12.380908","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Optical quality of NCLR's 1-kW 1-kHz XeCl excimer laser
The optical quality of NCLR's 1 kW, 1 kHz XeCl excimer laser has been investigated. Nearly diffraction limited beams can be obtained in short burst mode up to 1 kHz. Long burst mode operation is currently limited by the quality of the optics. The beam pointing variation is reduced to half the divergence angle and is found to be independent of the repetition rate of the laser system.