纳米计量应用的多功能MEMS/NEMS

2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013) Pub Date : 2013-08-01 DOI:10.1109/NANO.2013.6721047

L. Hao, J. Gallop, M. Stewart, K. Lees, Jie Chen

{"title":"纳米计量应用的多功能MEMS/NEMS","authors":"L. Hao, J. Gallop, M. Stewart, K. Lees, Jie Chen","doi":"10.1109/NANO.2013.6721047","DOIUrl":null,"url":null,"abstract":"As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.","PeriodicalId":189707,"journal":{"name":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","volume":"52 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Multi-functional MEMS/NEMS for nanometrology applications\",\"authors\":\"L. Hao, J. Gallop, M. Stewart, K. Lees, Jie Chen\",\"doi\":\"10.1109/NANO.2013.6721047\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.\",\"PeriodicalId\":189707,\"journal\":{\"name\":\"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)\",\"volume\":\"52 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NANO.2013.6721047\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO.2013.6721047","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

随着微纳机电系统(M/NEMS)越来越广泛地进入传感应用和精密纳米计量领域，考虑为广泛应用量身定制的激励和读出系统所带来的优势是及时的。在本文中，我们描述了一个我们正在开发的系统，它允许激励和读出方法的组合，这对许多潜在的应用产生了影响。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Multi-functional MEMS/NEMS for nanometrology applications

As micro- and nano-electromechanical systems (M/NEMS) enter more widely into sensing applications and precision nanometrology it is timely to consider the advantages to be gained from a excitation and readout system which may be tailored for a wide range of applications. In this paper we describe a system that we are developing which allows a combination of excitation and readout methods which impact on many potential applications.

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2013 13th IEEE International Conference on Nanotechnology (IEEE-NANO 2013)

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