Unimorph deformable mirror for oblique incidence applications

In order to apply in the optical path of large incident angle, an experimental platform based on 61-element unimorph deformable mirror (DM) is fabricated to study the influence of different incident angles on the correction ability of DM. The experimental results show that the larger the incident angle is, the smaller the reconstructed Zernike amplitudes are and the larger the normalized residual error is. Furthermore, a DM driven by an elliptical PZT is designed and fabricated, and its correction ability in the high incident angle optical path is tested experimentally. The results show that the designed elliptical PZT can effectively improve the correction ability of the DM in the vertical optical path.