完整的纳米线横条框架优化为多间隔图像化技术

M. B. Jamaa, G. Cerofolini, Y. Leblebici, G. Micheli
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引用次数: 6

摘要

纳米线交叉电路是一种新兴的架构范例,由于其可重构性,它承诺更高的集成密度和改进的容错性。在这篇论文中,我们首次提出利用多间隔图图化技术来制造高交叉点密度达1010 cm(-2)的纳米线交叉棒。我们提出了一种新的解码器制造方法,该方法可以包含在专门用于多间隔图像化技术的过程中。通过对编码方案的优化,解决了设计层面的变异性和制造复杂性等技术问题。我们展示了变异性总体降低了18%,并消除了制造复杂性开销。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Complete nanowire crossbar framework optimized for the multi-spacer patterning technique
Nanowire crossbar circuits are an emerging architectural paradigm that promises a higher integration density and an improved fault-tolerance due to its reconfigurability. In this paper, we propose for the first time the utilization of the multi-spacer patterning technique to fabricate nanowire crossbars with a high cross-point density up to 1010 cm(-2). We propose a novel decoder fabrication method that can be included in a process dedicated to the multi-spacer patterning technique. We address the technology problems consisting in the variability and fabrication complexity at the design level by optimizing the encoding scheme. We show an overall reduction of the variability by 18% and a cancelation of the fabrication complexity overhead.
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