高效场发射微器件和微显示器的研究方向之一

Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737) Pub Date : 2004-07-11 DOI:10.1109/IVNC.2004.1354935

N. Mukhurov, S. Zhdanok, I. Gasenkova, F.V. Plevako

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摘要

本文提出了一种基于氧化铝技术结合纳米碳类金刚石材料在平面阴极射线管微显示器的场发射极(FE)基阴极和阳极上构建真空三极管型微器件的方法。在3D-AA基板上，利用类碳厚膜和独立控制结构的FE对三极管系统进行了高效建模。

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One of perspective directions of creation of highly effective field emission microdevices and microdisplays

The paper is a suggested approach to the construction of vacuum triode type microdevices on field emitter (FE) matrix cathodes and anodes for flat cathode ray tube microdisplays based on alumina technology combined with nanocarbon diamondlike materials. Modeling of triode systems with FE from carbonlike thick films and separate controlling structures on 3D-AA substrates showed high efficiency.

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Technical Digest of the 17th International Vacuum Nanoelectronics Conference (IEEE Cat. No.04TH8737)

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