钽发射极的高温场蒸发

2006 19th International Vacuum Nanoelectronics Conference Pub Date : 2006-07-01 DOI:10.1109/IVNC.2006.335360

O. L. Golubev, Blashenkov Nm, Lavrent'ev GYa

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摘要

用磁性原子探针研究了钽发射体的高温场蒸发。在300 ~ 2500 K温度范围内观察到不同浓度的Ta3+和Ta2+离子，而Ta+离子只存在于高温下。温度升高导致蒸发场强度降低，导致离子电荷减少

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High Temperature Field Evaporation of Tantalum Emitter

A magnetic atom probe is used to study the high temperature field evaporation of Ta emitters. Varying concentrations of Ta3+ and Ta2+ ions are observed within the 300-2500 K temperature range while Ta+ ions only exist at high temperatures. Increasing temperature leads to reduction of evaporation field intensity causing the decrease in the charges of ions

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2006 19th International Vacuum Nanoelectronics Conference

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