用于激光应用的InGaAsP/InGaAsP MQW结构的移动特性

P. Wiedemann, M. Klenk, G. Laube, R. Weinmann, E. Zielinski
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引用次数: 0

摘要

作者对压缩应变多量子阱(MQW)结构的性质及其在激光应用中的优化进行了基础研究。在标准的低压金属有机气相外延设备上进行了应变InGaAsP/InGaAsP MQW结构的外延生长。高分辨率衍射测量结果与模拟结果非常吻合。二次离子质谱测量显示良好的井间均匀性。通过优化生长暂停和应变,获得了最佳阈值电流密度。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
MOVPE of strained InGaAsP/InGaAsP MQW structures for laser applications
The authors present basic studies about the properties of compressively strained multi-quantum well (MQW) structures and their optimization for laser applications. Epitaxial growth of strained InGaAsP/InGaAsP MQW structures was performed in standard low pressure metal organic vapor phase epitaxial equipment. High resolution diffractometry measurements showed excellent agreement with simulations. Secondary ion mass spectrometry measurements showed good well to well homogeneity. By optimizing growth pauses and strain a best threshold current density was achieved.<>
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