S. Kehrberg, Markus Dorwarth, M. Heitz, Carsten Geckeler, J. Mehner
{"title":"MEMS陀螺仪正交误差的先进计算方法","authors":"S. Kehrberg, Markus Dorwarth, M. Heitz, Carsten Geckeler, J. Mehner","doi":"10.1109/ICSENS.2013.6688463","DOIUrl":null,"url":null,"abstract":"MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.","PeriodicalId":258260,"journal":{"name":"2013 IEEE SENSORS","volume":"2247 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2013-12-19","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Advanced methods for calculating quadrature errors of MEMS gyroscopes\",\"authors\":\"S. Kehrberg, Markus Dorwarth, M. Heitz, Carsten Geckeler, J. Mehner\",\"doi\":\"10.1109/ICSENS.2013.6688463\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.\",\"PeriodicalId\":258260,\"journal\":{\"name\":\"2013 IEEE SENSORS\",\"volume\":\"2247 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-12-19\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2013 IEEE SENSORS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2013.6688463\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2013 IEEE SENSORS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2013.6688463","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Advanced methods for calculating quadrature errors of MEMS gyroscopes
MEMS vibratory angular rate sensors use the working principle of coupling a drive vibration mode with an orthogonal sense mode via Coriolis force. The parasitic coupling between the two eigenmodes caused by fabrication tolerances is called quadrature. Former work modeled quadrature effects between drive and detection mode by only adding a coupling term in the stiffness matrix. The new method is adding an inertial coupling term to the system mass matrix. This leads to a large decrease of the calculation time in combination with a higher accuracy.
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