160×120用于小型JR相机的非冷却红外焦平面反射镜

2006 5th IEEE Conference on Sensors Pub Date : 2006-10-01 DOI:10.1109/ICSENS.2007.355710

T. Seto, K. Kama, M. Kimata, M. Takeda, H. Hata, Y. Nakaki, H. Inoue, Y. Kosasayama, Y. Ohta, H. Fukumoto

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引用次数: 1

摘要

我们为小型红外相机开发了一种160 × 120 SOI(绝缘体上硅)二极管非冷却红外焦平面阵列(IRFPA)，具有25 μ m像素间距。IRFPA具有高响应像素结构，封装在芯片级真空封装(CSVP)中，以减小封装尺寸。封装尺寸为14.5(L) × 13.5(W) × 1.2(H) mm。所研制的红外焦平面成像仪在f/1.0光学条件下获得了NETD(噪声等效温差)小于60 mK的红外图像。

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160×120 Uncooled IRFPA for Small JR Camera

We have developed a 160 times 120 SOI (silicon on insulator) diode uncooled IRFPA (Infrared Focal Plane Array) with 25 mum pixel pitch for a small IR camera. The IRFPA has a highly responsive pixel structure and is packaged in a chip scale vacuum package (CSVP) in order to reduce the package size. The size of the package is 14.5(L) times 13.5(W) times 1.2(H) mm. An infrared image of less than 60 mK in NETD (Noise Equivalent Temperature Difference) with f/1.0 optics has been obtained by the developed IRFPA.

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2006 5th IEEE Conference on Sensors

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