静电放电对元件失效的研究

V. Lakshiminarayanan, A. Manoj Kumar
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引用次数: 1

摘要

静电放电(ESD)是半导体器件失效的主要原因。近年来,随着器件复杂性的增加和元件密度的提高,器件的几何形状不断缩小,对ESD的易感性也在增加。本文讨论了电子系统中静电放电引起的失效机制,以及使用不同技术在不同阶段尽量减少失效的技术。本文还介绍了基于案例研究的实例。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Studies on the failure of components due to electrostatic discharge
Electrostatic discharge (ESD) is a major cause of failure of semiconductor components. With the increasing complexity of devices, and higher component densities, device geometries have been shrinking and susceptibility to ESD damage has increased in the recent years. This paper discusses the ESD induced failure mechanisms in electronic systems and techniques to minimize failures at various stages using different techniques. Examples based on case studies carried out are also presented.
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