用于生物传感的氮化硅流体调谐光子晶体

Manoranjan Kumar, S. M, P. T., N. K.
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引用次数: 1

摘要

在这项工作中,氮化硅(Si3N4)为基础的流体调谐光子晶体的生物传感应用提出。光学结构设计在绝缘体上的氮化硅上。绝缘体衬底上的氮化硅是短波生物传感器设计中最有前途的材料之一。在短波长,氮化硅材料被认为是最有前途的光学集成电路材料。该传感器的结构由氮化硅输入和输出波导组成,两者之间由流体调谐光子晶体分隔。流体调谐光子晶体作为传感区域。灵敏度是基于流体调谐光子晶体的折射率。该传感器的工作波长范围为660nm。流态调谐光子晶体由矩形光子晶体阵列组成。光子晶体的孔洞直径约为160nm,高度约为200nm。采用有机发光二极管作为光源。OLED与输入波导耦合。将PDMS微流控通道模制在矩形光子晶体结构上。利用流形模态解和流形时域有限差分(FDTD)仿真工具对结构进行建模和分析。如果制造出这种装置,则可用于与病理参数相关的各种疾病的早期检测。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Silicon nitride based fluidically tuned photonic crystal for bio-sensing application
In this work, silicon nitride (Si3N4) based fluidically tuned photonic crystal for a biosensing application is presented. The optical structure is designed on Si3N4 on insulator. The Si3N4 on insulator substrate is found to be one of the most promising materials for the design of bio- sensor at short wavelength. At short wavelength Si3N4 material is found to be most promising material for optical integrated circuits. The structure of the sensor consists of Silicon nitride input and output waveguides separated by a fluidically tuned photonic crystal. Fluidically tuned photonic crystal acts as a sensing region. The sensitivity is based on refractive index of fluidically tuned photonic crystal. The proposed sensor is designed to operate in the visible wavelength range of 660nm. Fluidically tuned photonic crystal consists of rectangular photonic crystal array. The holes of photonic crystal are approximately 160nm in diameter and height is 200nm. Organic light emitting diode is used as an optical source. OLED is coupled to input waveguide. The PDMS microfluidic channel is moulded on the rectangular photonic crystal structure. The structure is modelled and analysis is carried out by using Lumerical mode solution and Lumerical Finite Difference Time Domain (FDTD) simulation tools. Such devices if fabricated can be employed for early detection of various diseases related to pathological parameters.
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