{"title":"小型化光谱仪技术","authors":"J. Antila","doi":"10.1109/WIO.2010.5582486","DOIUrl":null,"url":null,"abstract":"VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation.","PeriodicalId":201478,"journal":{"name":"2010 9th Euro-American Workshop on Information Optics","volume":"14 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-07-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Miniaturized spectrometer technologies\",\"authors\":\"J. Antila\",\"doi\":\"10.1109/WIO.2010.5582486\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation.\",\"PeriodicalId\":201478,\"journal\":{\"name\":\"2010 9th Euro-American Workshop on Information Optics\",\"volume\":\"14 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-07-12\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 9th Euro-American Workshop on Information Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/WIO.2010.5582486\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 9th Euro-American Workshop on Information Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/WIO.2010.5582486","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
VTT has developed new MEMS based spectrometer technologies to meet various spectral sensing demands from UV to thermal IR. New inventions have been made to cover wavelength ranges from 350 nm up to 14 µm and to enlarge apertures of devices for increased throughput. This paper reviews VTT's surface micromachined Fabry-Perot interferometer technologies, highlights their key parameters and describes the related instrumentation.
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