飞秒激光微加工实现全集成光流器件

2011 International Workshop on Biophotonics Pub Date : 2011-06-08 DOI:10.1109/IWBP.2011.5954858

R. Osellame, R. Martínez Vázquez, A. Crespi, G. Cerullo, R. Ramponi

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引用次数: 0

摘要

飞秒激光微加工是制造光波导和化学蚀刻微通道的强大工具，具有前所未有的内在3D能力。介绍了该技术的基本原理和全集成光流体器件的实例。

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Femtosecond laser micromachining for the realization of fully integrated optofluidic devices

Femtosecond laser micromachining is a powerful tool for the fabrication of both optical waveguides and, when followed by chemical etching, of microchannels, with unprecedented intrinsic 3D capabilities. Basics of the technique and examples of fully integrated optofluidic devices are presented.

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2011 International Workshop on Biophotonics

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