{"title":"用于快速响应，在线分析电子半导体气体中ppb杂质的交钥匙工业仪器","authors":"R. Mever, J. E. Perez, S. Strickland","doi":"10.1109/LEOSST.2000.869720","DOIUrl":null,"url":null,"abstract":"A totally integrated hardware and software gas analysis system, IRGAS/sup TM/, is newly available to the semiconductor process engineer to monitor the ppb quality level of the corrosive and toxic cleaning and etching gases in real-time and on-line with process tools in a fab plant. The IRGAS/sup TM/ system is based upon an industrial-ruggedized FTIR spectrometer coupled with a nickel-plated stainless-steel long-path-gas-cell containing stainless-steel mirrors coated with a heavy-layer of reflective-gold over a thick-nickel substrate for chemical corrosion resistance. An electronically-operated gas handling manifold, pumping system, and computer display package are provided within a purgeable stainless-steel enclosure for user safety protection.","PeriodicalId":415720,"journal":{"name":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","volume":"266 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Turnkey industrial instrumentation for fast-response, on-line analysis of ppb impurities in the electronic semiconductor gases\",\"authors\":\"R. Mever, J. E. Perez, S. Strickland\",\"doi\":\"10.1109/LEOSST.2000.869720\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"A totally integrated hardware and software gas analysis system, IRGAS/sup TM/, is newly available to the semiconductor process engineer to monitor the ppb quality level of the corrosive and toxic cleaning and etching gases in real-time and on-line with process tools in a fab plant. The IRGAS/sup TM/ system is based upon an industrial-ruggedized FTIR spectrometer coupled with a nickel-plated stainless-steel long-path-gas-cell containing stainless-steel mirrors coated with a heavy-layer of reflective-gold over a thick-nickel substrate for chemical corrosion resistance. An electronically-operated gas handling manifold, pumping system, and computer display package are provided within a purgeable stainless-steel enclosure for user safety protection.\",\"PeriodicalId\":415720,\"journal\":{\"name\":\"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)\",\"volume\":\"266 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2000-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/LEOSST.2000.869720\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 Digest of the LEOS Summer Topical Meetings. Electronic-Enhanced Optics. Optical Sensing in Semiconductor Manufacturing. Electro-Optics in Space. Broadband Optical Networks (Cat. No.00TH8497)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/LEOSST.2000.869720","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Turnkey industrial instrumentation for fast-response, on-line analysis of ppb impurities in the electronic semiconductor gases
A totally integrated hardware and software gas analysis system, IRGAS/sup TM/, is newly available to the semiconductor process engineer to monitor the ppb quality level of the corrosive and toxic cleaning and etching gases in real-time and on-line with process tools in a fab plant. The IRGAS/sup TM/ system is based upon an industrial-ruggedized FTIR spectrometer coupled with a nickel-plated stainless-steel long-path-gas-cell containing stainless-steel mirrors coated with a heavy-layer of reflective-gold over a thick-nickel substrate for chemical corrosion resistance. An electronically-operated gas handling manifold, pumping system, and computer display package are provided within a purgeable stainless-steel enclosure for user safety protection.
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