A real time vision feedback system for automation of a nano-assembly manipulator inside scanning electron microscope

In this paper, a vision feedback mechanism is simulated and proposed to automate the assembly process of nano-devices. The bottom-up approach using heterogeneous assembly at the nanoscale is become recently a doable trail in nano-manufacturing. Nano-manipulators inside a scanning electron microscope (SEM) have been adopted as a nanofabrication method to build nano-devices from various nano-components in real-time. Most of the current nanomanipulators inside SEM are operated manually and take relatively long time to construct nano-devices. Obtaining a feedback signal for precise automated nanomanipulations poses a major technical challenge. This research proposes the use of a vision feedback control to automate the most well-known Zyvex® nano-manipulators inside SEM. A proof of concept is demonstrated using a macroscale stage with a vision feedback system, end-effector and computer integrated controller based on Labview package. The evaluation of this mechanism is conducted by observing the positioning of an X-Y actuated end-effector accurately near a predefined target. This feedback system can be integrated with Zyvex® nano-manipulators inside a SEM to automate the nano-manufacturing process.