机械应变硅中氢血小板的演化

D. Pyke, R. Elliman, J. McCallum
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引用次数: 0

摘要

利用弹性反冲探测(ERD)、卢瑟福后向散射和通道(RBS-C)和透射电镜(TEM)研究了本征应力和外加应力对氢扩散和俘获的影响。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Hydrogen platelet evolution in mechanically strained silicon
The effect of intrinsic and applied stress on hydrogen diffusion and trapping are studied by elastic-recoil detection (ERD), Rutherford backscattering and channelling (RBS-C) and transmission electron microscopy (TEM).
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