PTP运动控制XY定位系统用柔性梁

B. Kim, Sangdeok Park, W. Chung, Y. Youm
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引用次数: 2

摘要

提出了一种由前馈和反馈控制器组成的PTP运动控制方法,用于柔性梁XY定位系统的精确定位和抑制振动。提出了基于系统解析建模和频率方程的输入预成型作为前馈控制器,以产生期望的响应。提出了一种基于鲁棒内环补偿器的反馈控制器,以稳定整个系统并满足闭环性能。实验证明了所提控制器的有效性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
PTP motion control of XY positioning systems with a flexible beam
A PTP motion control method composed of a feedforward and feedback controller is proposed to get accurate positioning and to suppress vibration of a XY positioning system with a flexible beam. The input preshaping based on the analytic modeling and frequency equation of the system is proposed as a feedforward controller to produce desired responses. A feedback controller is proposed based on a robust internal-loop compensator to stabilize the whole system and to meet closed-loop performance. Experiments are carried out to show the validity of the proposed controller.
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