高性能六阶Sigma-Delta MEMS加速度计的建模与仿真

2011 International Conference on Computational Intelligence and Communication Networks Pub Date : 2011-10-07 DOI:10.1109/CICN.2011.113

G. Saxena, V. Thamarai

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引用次数: 7

摘要

MEMS制造工艺本身就是一种坚固耐用的技术，在恶劣环境和关键应用中具有巨大的潜力，可以提出新的解决方案。本文报道了一种针对惯性导航应用的高性能闭环MEMS加速度计。本文的动机是利用LEOS制造的MEMS传感器开发一种高分辨率惯性级闭环加速度计。采用美国德州仪器公司提供的6阶Sigma-Delta集成电路ADS-1278，设计并详细仿真了MEMS加速度计的信号调理电路。通过P-Spice仿真对系统的功能和性能进行了研究。在+/-1g的测量范围内，估计信噪比(SNR)为97.8dB，有效比特数(ENOB)为16位，过采样比(OSR)为128。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Modeling and Simulation of High Performance Sixth Order Sigma-Delta MEMS Accelerometer

MEMS fabrication process is an inherently rugged technology and has great potential to bring forth novel solutions on the harsh environment and critical applications. This paper reports on a very high performance closed-loop MEMS accelerometer targeted at inertial navigation applications. Motivation of this paper is to develop a high resolution inertial grade closed loop Accelerometer using the MEMS sensor fabricated at LEOS. The MEMS sensor with comb type structure has a sensitivity of 6 pF / g. This paper reports on the design and detailed simulation of signal conditioning circuit for MEMS accelerometer using a 6th order Sigma-Delta IC ADS-1278 provided by Texas Instruments. The functionality and the performance of the system were studied by P-Spice simulation. Signal-to-noise ratio (SNR) of 97.8dB and effective number of bits (ENOB) of 16 bits over a measurement range of +/-1g was estimated with an over sampling ratio (OSR) of 128.

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2011 International Conference on Computational Intelligence and Communication Networks

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