激光等离子体的高分辨率成像揭示激光光斑尺寸对等离子体发射的影响

2022 IEEE International Conference on Plasma Science (ICOPS) Pub Date : 2022-05-22 DOI:10.1109/ICOPS45751.2022.9813338

K. M. Mongey, R. Brady, E. Sokell, B. Delaney, F. O’Reilly

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引用次数: 0

摘要

激光等离子体可以在小体积内产生高通量的软x射线辐射，使其成为极紫外光纳米光刻[1]和软x射线断层扫描细胞成像[2]等应用的理想照明设备。

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High Resolution Imaging of Laser Plasmas Revealing the Effects of Laser Spot Size on Plasma Emission

Laser plasmas can produce a high flux of soft x-ray radiation from a small volume, making them ideal for illumination for applications such as in EUV nano-lithography [1] and in cell imaging via soft x-ray tomography [2] .

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2022 IEEE International Conference on Plasma Science (ICOPS)

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