双频势垒探测器的研制

E. Plis, S. Myers, D. Ramirez, S. Krishna
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引用次数: 7

摘要

本文报道了在SK红外波段采用势垒设计的InAs/GaSb型应变层超晶格(T2SL)双波段探测器的研制。在过去的五年中,我们展示了nBn和pBp设计的中波/长波(MW/LWIR,截止波长分别为5 μm和10.0 μm)和LW/LWIR(截止波长分别为9 μm和11.0 μm)探测器。最近的研究成果包括基于pBp势垒结构的T2SL的高性能偏置可选长/长波长红外光电探测器。在77 K下,两个通道50%截止波长分别为~ 9.2 μm和~ 12 μm。在约35 μm厚的残余GaSb衬底的背面照明配置下,“蓝色”和“红色”LWIR吸收体的饱和QE值分别为34%和28%。“蓝色”和“红色”通道的体限暗电流水平分别为+ 100 mV时的~ 2.6 × 10-7 A/cm2和- 200 mV时的~ 8.3 × 10-4 A/cm2。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Development of dual-band barrier detectors
We report on the development of dual-band InAs/GaSb type-II strained layer superlattices (T2SL) detectors with barrier designs at SK Infrared. Over the past five years, we demonstrated mid-wave/long-wave (MW/LWIR, cut-off wavelengths are 5 μm and 10.0 μm), and LW/LWIR (cut-off wavelengths are 9 μm and 11.0 μm) detectors with nBn and pBp designs. Recent results include a high performance bias-selectable long/long-wavelength infrared photodetector based on T2SL with a pBp barrier architecture. The two channels 50% cut-off wavelengths were ~ 9.2 μm and ~ 12 μm at 77 K. The “blue” and “red” LWIR absorbers demonstrated saturated QE values of 34 % and 28 %, respectively, measured in a backside illuminated configuration with a ~ 35 μm thick layer of residual GaSb substrate. Bulk-limited dark current levels were ~ 2.6 x 10-7 A/cm2 at + 100 mV and ~ 8.3 x 10-4 A/cm2 at - 200 mV for the “blue” and “red” channels, respectively.
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