Guang Qian, B. Niu, Wu Zhao, X. Gu, Fengjie Zhou, Guanyu Li, Y. Kong, Tangsheng Chen
{"title":"基于InP-MQW光波导的周期性集成CL-TWE MZI电光调制器","authors":"Guang Qian, B. Niu, Wu Zhao, X. Gu, Fengjie Zhou, Guanyu Li, Y. Kong, Tangsheng Chen","doi":"10.1109/ACP.2018.8595949","DOIUrl":null,"url":null,"abstract":"In this paper, we reported the design, fabrication and preliminary measurements of an integrating periodically capacitive-loaded travelling wave electrode (CL-TWE) Mach- Zehnder interferometer (MZI) modulator based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration includes an optical MZI, a DC electrode, two phase electrodes, a U-electrode and an I-electrode. It was fabricated by standard photolithography, ICP dry etching, electroplating and etc. Measurement results show that the EO modulator has a propagation loss of about 9.4 dB/cm and an electric bandwidth of larger than 40 GHz.","PeriodicalId":431579,"journal":{"name":"2018 Asia Communications and Photonics Conference (ACP)","volume":"94 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2018-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Integrating periodically CL-TWE MZI electro-optic modulator based on InP-MQW optical waveguides\",\"authors\":\"Guang Qian, B. Niu, Wu Zhao, X. Gu, Fengjie Zhou, Guanyu Li, Y. Kong, Tangsheng Chen\",\"doi\":\"10.1109/ACP.2018.8595949\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper, we reported the design, fabrication and preliminary measurements of an integrating periodically capacitive-loaded travelling wave electrode (CL-TWE) Mach- Zehnder interferometer (MZI) modulator based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration includes an optical MZI, a DC electrode, two phase electrodes, a U-electrode and an I-electrode. It was fabricated by standard photolithography, ICP dry etching, electroplating and etc. Measurement results show that the EO modulator has a propagation loss of about 9.4 dB/cm and an electric bandwidth of larger than 40 GHz.\",\"PeriodicalId\":431579,\"journal\":{\"name\":\"2018 Asia Communications and Photonics Conference (ACP)\",\"volume\":\"94 1\",\"pages\":\"0\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 Asia Communications and Photonics Conference (ACP)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ACP.2018.8595949\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 Asia Communications and Photonics Conference (ACP)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ACP.2018.8595949","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Integrating periodically CL-TWE MZI electro-optic modulator based on InP-MQW optical waveguides
In this paper, we reported the design, fabrication and preliminary measurements of an integrating periodically capacitive-loaded travelling wave electrode (CL-TWE) Mach- Zehnder interferometer (MZI) modulator based on InP-based multiple quantum well (MQW) optical waveguides. The device configuration includes an optical MZI, a DC electrode, two phase electrodes, a U-electrode and an I-electrode. It was fabricated by standard photolithography, ICP dry etching, electroplating and etc. Measurement results show that the EO modulator has a propagation loss of about 9.4 dB/cm and an electric bandwidth of larger than 40 GHz.
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