基于TCAD仿真的像素传感器护环几何优化

F. Larbi, S. Oussalah, N. Belkhelfa, A. Lounis
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引用次数: 4

摘要

本文提出了一种利用多保护环结构设计中的黄金分割来设计n-in-n ATLAS像素传感器形状的新方法。为了优化其布局参数,提出了一种新的结构。通过TCAD仿真对优化后的保护环结构进行了性能评价。结果表明,采用黄金比例设计的保护环相关优化结构可获得高击穿电压。研究了保护环结构的击穿行为与保护环宽度、金属宽度和悬垂等参数的黄金比例的关系。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Pixel sensor guard-ring geometry optimization by TCAD simulation
This paper presents a new approach of designing a n-in-n ATLAS pixel sensor shape inspired form golden ratio by using the golden ratio in the design of the multi guard rings structure. A new configuration is proposed in the goal of optimizing its layout parameter. The performance of the optimized guard rings structure is evaluated with TCAD simulation. It's shown that the optimized structure related to the guard ring designed with the golden ration leads to the high breakdown voltage. The breakdown behavior of the guard ring structure is studied as a function of the golden ration applied to the guard ring parameters, like the width implant, metal width and overhang.
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