微波技术用于复杂情况下的等离子体诊断

J. Yao, Zhi Yu, C. Yuan, Zhongxiang Zhou, Hailu Wang, Zebin Li
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引用次数: 0

摘要

本文将微波技术应用于同轴网格空心电极大体积交流辉光放电中等离子体参数的测量。通过测量微波通过等离子体的相移,确定了空心交流放电等离子体中等离子体密度随输入功率变化的特性。微波的相移由带天线的矢量网络分析仪(PNA-N5234A)测定,选择微波频率为30GHz。然后,将实验结果与理论结果进行了比较,结果吻合较好。此外,利用改进的探针技术,还通过探针诊断获得了等离子体参数。并将探头检测结果与微波检测结果进行了比较,结果表明,在交流辉光放电情况下,微波诊断更加稳定、准确。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Microwave technology used for plasma diagnostic in complicated situations
In this paper, the microwave technology has been applied to measure the plasma parameters in large-volume AC glow discharge with coaxial gridded hollow electrodes. By measuring the phase shift of microwave through the plasma, the characteristics of the plasma density changing with the input power in hollow ac discharge plasma has been confirmed. The phase shift of the microwave is determined by vector network analyzer (PNA-N5234A) with antennas, and the selected microwave frequency is 30GHz. Then, the experimental results are compared with the theoretical results and are in good agreement. Additionally, using the improved probe technology, the plasma parameters also are obtained by probe diagnostics. And the probe results are compared to the microwave technology, which indicates that in the AC glow discharge the microwave diagnostic is more stable and accurate.
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