用于研究材料表面的压电传感器

W. Pajewski, P. Kielczynski, M. Szalewski
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引用次数: 2

摘要

本文介绍了一种用于材料表面检测的压电传感器的理论分析和测试结果。传感器由薄压电板(100 /spl mu/m)与薄金属(例如钼)箔粘合而成。建立了单晶的弹性常数和灵敏度的解析公式。所进行的分析允许陈述传感器尺寸的最佳参数,应用材料的杨氏模量。一个重要的因素是节点平面的位置及其对传感器灵敏度的影响。对陶瓷板和金属箔的各种组合进行了理论分析,并将其应用于传感器的实际实现中。这项工作得到了波兰科学研究委员会的资助,编号PB 0503/P4/93/05。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
Piezoelectric sensor for the investigation of material surfaces
In this paper the theoretical analysis and the results of testing of a piezoelectric sensor for the investigation of material surfaces are presented. The sensor consists of a thin piezoelectric plate (100 /spl mu/m) bonded with a thin metal (e.g. molybdenum) foil. The analytical formulae for spring constants and sensitivity of the monomorph have been established. The performed analysis permits to state the optimal parameters of the sensor dimensions, the Young modulus of applied materials. An important factor is the position of the nodal plane and its influence on sensor sensitivity. Various combinations of ceramic plates and metal foils were theoretically analysed and were applied in practical realisations of the sensors. This work was supported by the Polish Committee of the Scientific Research Grant, No PB 0503/P4/93/05.
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